Designing and Analysis of Comb Drives using Different Materials

Abstract

-- This paper brings in the design of MEMS electrostatically actuated by a rectangular comb drives. By using different structural materials, the comb geometries are designed and there result is analyzed. Finite element analysis is used to establish the concept of controlled displacement of the movable comb fingers, achieved by setting down the amount of electrostatic force produced by the device and to reduce power consumption, PMMA and PTFE polymers produces high displacement at very low voltage as compared to Poly-Si.